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Spare Parts > Mechanical Components

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Sigma Chiller Pump

Sigma Chiller Pump, All SigmaClean Systems

Water Pump Assy

Water Pump Assy, Wafermark II, Wafermark 345, Superclean

SigmaClean Vacuum Manifold Assy

SigmaClean Vacuum Manifold Assy, for all SigmaCleans, SuperCleans

Mat Comm Cable

Mat Comm Cable

Wafermark Flow Switch

Flow Switch, Wafermark II, Wafermark 345

Sigma Chiller Reservoir

Sigma Chiller Reservoir, Sigma Systems Only

Elevator Lead Screw W/Turkite Bearing

Elevator Lead Screw W/Turkite Bearing, Wafermark II

Indexer Elevator Assy, Wafermark 345

Indexer Elevator Assy, Wafermark 345

Linear Bearing Focus Motor, WMK II

Linear Bearing Focus Motor, WMK II

Wafermark II Transfer Arm

Wafermark II Transfer Arm, this is the extended arm to allow for a power meter to be mounted onto it.