Spare Parts > Mechanical Components
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Sigma Chiller Pump
Sigma Chiller Pump, All SigmaClean Systems
Water Pump Assy
Water Pump Assy, Wafermark II, Wafermark 345, Superclean
SigmaClean Vacuum Manifold Assy
SigmaClean Vacuum Manifold Assy, for all SigmaCleans, SuperCleans
Mat Comm Cable
Mat Comm Cable
Wafermark Flow Switch
Flow Switch, Wafermark II, Wafermark 345
Sigma Chiller Reservoir
Sigma Chiller Reservoir, Sigma Systems Only
Elevator Lead Screw W/Turkite Bearing
Elevator Lead Screw W/Turkite Bearing, Wafermark II
Indexer Elevator Assy, Wafermark 345
Indexer Elevator Assy, Wafermark 345
Linear Bearing Focus Motor, WMK II
Linear Bearing Focus Motor, WMK II
Wafermark II Transfer Arm
Wafermark II Transfer Arm, this is the extended arm to allow for a power meter to be mounted onto it.
